Effects of Added Mass on Lead-Zirconate-Titanate Thin-Film Microactuators in Aqueous Environments
نویسندگان
چکیده
منابع مشابه
Microstereolithography of lead zirconate titanate thick film on silicon substrate
Ž . Ž . The microstereolithography mSL of lead zirconate titanate PZT thick films on platinum-buffered silicon substrates is reported for Ž . the first time in this paper. Crack-free PZT thick films 80–130 mm thick have been fabricated by laser direct-write UV polymerization from the HDDA-based UV curable PZT suspensions. The characterization of the fired films shows dielectric permittivities o...
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Lead zirconate titanate ~PZT! thin films with a Zr/Ti ratio of 52/48 were deposited on platinized silicon substrates by a sol-gel method and crystallized with preferred ~111! or ~100! orientation. Both the piezoelectric properties (d33) and the field-induced strains of the films with different thickness and preferred orientation were measured by a laser Doppler heterodyne interferometer. The we...
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ژورنال
عنوان ژورنال: Journal of Vibration and Acoustics
سال: 2016
ISSN: 1048-9002,1528-8927
DOI: 10.1115/1.4034613